Magnetically levitated TURBOVAC MAGiNTEGRA
/ Fluid entrainment pumps / Magnetically levitated TURBOVAC MAGiNTEGRA
TURBOVAC MAGiNTEGRA
Turbomolecular pumps, magnetically levitated
Turbomolecular pumps, magnetically levitated
- Flexible interface options
- On-board frequency converter and power supply
- Easy, space-saving system integration
Your needs:
- Clean, high and ultra-high vacuum generation
- Suitable for industrial uses such as PVD and coating processes and display and glass coating
- Impervious to particles or deposits
- Low maintenance requirements
Our solutions:
- Pumping speeds of up to 2,200 l/s
- High pumping speeds and high compression ratios for all gases
- Holweck stage incorporated
- Resistant to particles and deposits
- Insensitive to shock-venting
- Monitoring and self-protection functions
- Maintenance-free in most applications